Optimization Algorithm for Model-Based Optical Proximity Correction

Yici Cai,Yang Wang,Qiang Zhou,Xianlong Hong
DOI: https://doi.org/10.3321/j.issn:0253-4177.2005.03.034
2005-01-01
Abstract:The optimization algorithm considering the surrounding feature influences is presented. The algorithm implements the single-loop optimization for the target feature and the dual-loop optimization between the target features and the surrounding features by using the self-adaptive step cutting and moving strategy. The experiments show that this algorithm can achieve much improvement in correction precision and efficiency.
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