Rules-Based Optical Proximity Correction With V-Support Vector Regression

Zy Li,Wm Wu,Xl Hong,Y Wang
2003-01-01
Abstract:A new approach for rides-based optical proximity correction is presented. The discussion addresses on how to select and construct more concise and practical rides-base as well as how to apply that rules-base. The v-support vector regression method is used to generate a mathematical expression from rule data. Experimental results demonstrate applying rules calculated from the expression matches well with that from the ride table.
What problem does this paper attempt to address?