Abstract:Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration.

Dual Beam-Mass Structure Gyroscope Micromachined by Deep Rie Process

A Bulk Micromachined Gyroscope With Improved Quality-Factors At Atmospheric Pressure

An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Composite Cantilever Beam-Mass Structure Gyroscope by A Novel Etching Technology

A novel bulk micromachined gyroscope based on a rectangular beam-mass structure

Performance Characterization of a Bulk Micromachined Gyroscope Working at Atmosphere

A Micromachined Piezoresistive Angular Rate Sensor with a Composite Beam Structure

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

A Novel Bulk Micromachined Gyroscope with Slots Structure Working at Atmosphere

Bulk Micromachined Vibrating Wheel Rate Gyroscope

A Novel Silicon Micromachined Gyroscope With High Q At Atmosphere

A Novel Microelectromechanical Resonant Gyroscope

Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

A Bulk Micromachined Z-Axis Single Crystal Silicon Gyroscope for Commercial Applications

A Bulk Micromachined Vibratory Lateral Gyroscope Fabricated With Wafer Bonding And Deep Trench Etching

A Doubly Decoupled Micromachined Vibrating Wheel Gyroscope

Design and Fabrication of an Electrostatically Suspended Micromachined Gyroscope

A Decoupled Microelectromechanical Resonant Gyroscope

Integrated bulk-micromachined gyroscope using deep trench isolation technology