A Study on the Microstructure of W/Mo Superlattice Thin Films

Li Geyang,Zhang Liuqiang,Xu Junhua,Wu Liang,Li Pengxing,Gu Mingyuan
DOI: https://doi.org/10.3969/j.issn.1001-4381.1999.03.006
1999-01-01
Abstract:The research on the nano-multilayer films has attracted wide attention because of their abnormal properties in physics and mechanics. The microstructure of the W/Mo nano-multilayer film has been investigated by means of XRD and TEM. It is shown that, due to W and Mo having the same BCC structure with approximately lattice constant, columnar grains grow through modulation interface in the way of epitaxy, forming polycrystal superlattice in the nano-multilayer films.
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