Microstructures and Nano Mechanical Properties of the Metal Tungsten Film

Zhu Li-na,Li Guo-lu,Wang Hai-dou,Xu Bin-shi,Zhuang Da-ming,Liu Jia-jun
DOI: https://doi.org/10.1016/j.cap.2008.05.003
IF: 2.856
2008-01-01
Current Applied Physics
Abstract:The W film was prepared on 1045 steel by magnetron sputtering, with the thickness of 2μm, its surface and cross-section morphologies were investigated with SEM, and the phase structure was analyzed with XRD. X-ray stress determinator was utilized to measure its residual stress, and the nano-hardness and elastic modulus of the film were surveyed by nano-indentation tester. The results show that the surface of W film is very compact and smooth; the particles arranged regularly, the granularity of the thin film is about 1μm. The microcracks, cavities and desquamation were not found in the film and interface, and the bonding between the W film and substrate is well. The XRD results showed that the W film had a body-centered cubic structure, the lattice constant: a=0.316nm, the growth preferred orientations are (110) and (220). The compressive stress (−169MPa) was found on the surface. The average nano-hardness and elastic modulus of W film are 15.22GPa, 176.64GPa, respectively, and the mechanical properties of W film are well.
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