Laser stage system for sub-micron E-beam exposure machine

Yeyi Liu,Tong Tian,Jin Qian

1998-01-01

Abstract:A laser stage system for sub-micron E-beam exposure machine which is being applied to the field at present was introduced. Its technical characteristics were described in detail, the error factors affecting the repeated measuring accuracy were analyzed, the technical specifications which have been attained in practical testing were given.

What problem does this paper attempt to address?

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

KUANG Cui-fang,FENG Qi-bo,ZHANG Bin,CHEN Shi-Qian

DOI: https://doi.org/10.3321/j.issn:0258-7025.2005.09.024

2005-01-01

Chinese Journal of Lasers

Abstract:A novel method for measuring four-degree-of-freedom geometric errors of a linear stage is put forward. A single-mode fiber-coupled laser module is used, and the laser beam from this laser module is highly stable, and can be used as the reference line for straightness error and angular error measurements. Only a corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angular errors. In this way, the horizontal and vertical straightness errors as well as yaw and pitch errors can be measured simultaneously. At the same time, there is no cable connection in the moving target, which gives a great convenience in the workshop measurements. The four-degree-of-freedom measuring system (FDMS) based on the above method has been developed, and the system has the resolution of less than 0.1 micrometer for straightness error measurement and 0.5 arc-sec for angular error measurement. The stability, repeatability experiments and the comparison experiments with API 5D laser measuring system were done. Experimental results and theoretical analyses showed that the measurement accuracies of straightness error and angular errors are about±1.0 μm/m and±0.5 ″respectively within the measurement range of 2 m.
A Straightness Measurement System Using a Single-Mode Fiber-Coupled Laser Module

CF Kuang,QB Feng,B Zhang,B Liu,SQ Chen,ZF Zhang

DOI: https://doi.org/10.1016/j.optlastec.2003.09.016

IF: 4.291

2005-01-01

Sensors and Actuators A Physical

Abstract:A simple and novel method for measuring four-degree-of-freedom geometric errors of a linear stage was put forward. A single-mode fiber-coupled laser module was used. Only a cube corner retro-reflector and a beam splitter were adopted in the moving target in order to sense the straightness errors and angular errors, respectively. In this way, the horizontal and vertical straightness errors as well as yaw and pitch errors can be measured simultaneously. Theoretic error separation has been analyzed in detail and the straightness-compensated method was given. The system based on the above method was developed. In comparison with an API five-dimensional laser measurement system, the accuracy of the measuring straightness error is about ±2.5μm within the measuring range of ±500μm, and the angular errors are about ±3arcsec within the range of ±400arcsec. In addition, there is no cable connection in the moving target, which is a great convenience for the workshop measurements.
Intelligent Measuring System for Performance Parameters of Laser Range Finder

Song Li

2001-01-01

Abstract:In order to measure the performance parameters of laser range finders, a new intelligent measuring system is developed, which introduces advanced control technologies, very quick and convenient WIN32 computer software and a skillfully designed beam splitter system. It can synchronously measure optical axis consistency, width and energy of the pulse, beam divergence angle, and so on. A 1296×1030 CCD is adopted in order to ensure 10″ of spatial resolving ability; A 350MHz oscilloscope is used to catch the laser pulse as narrow as 10ns; A laser power meter which has high accuracy and large dynamic scope is used to obtain accurate energy measurement of the laser pulse. The system has been checked and accepted, and all the performance parameters meet the design demands. Now it is used by user and operates very well.
Melt Level Measurement for the CZ Crystal Growth Using an Improved Laser Triangulation System

Senwei Xiang,Feng Pan,Ke Xiang,Xuanyin Wang

DOI: https://doi.org/10.1016/j.measurement.2017.02.018

IF: 5.6

2017-01-01

Measurement

Abstract:An improved image-based laser-triangulation measurement system is proposed in this paper to measure the melt level in CZ crystal pullers. The system uses a line laser to overcome the deficiency of the traditional laser-triangulation system caused by the heat shield. The laser line projected to the melt surface and the bottom of the heat shield generates two scattered bars, which are captured by the camera. The relationship between the pixel distance of the two bars and the melt level is studied. An optimized adaptive laser bar detection approach is applied to measure the melt level quickly and accurately. Three experiments have been made to demonstrate the advantages of the system. The calibration experiment shows the system has a measurement resolution of 0.0755mm. The accuracy experiment proves the system has a precise measurement performance and the robustness experiment demonstrates the system using a truncated mean filter is reliable and robust.
Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

Shang Hong-bo,Cen Zhao-feng,Li Xiao-tong,Liu Qiang-sheng,Hu Wei

DOI: https://doi.org/10.1117/12.866868

2010-01-01

Abstract:The quality of the ultra-short laser pulse need to be controlled in applications. In this paper, the effects on ultra-short laser pulse beam quality caused by surface errors and assembly errors in real optical systems is analyzed in a microscope objective system. Zernike polynomials are used to describe the surface errors and error limit is set for the tilt and decenter in assembly. When coming to calculations, we firstly take samples from the incident laser pulse and decompose it into different frequency components; then we use ray-tracing combing with diffraction integral from the exit pupil to the focal plane for calculation. According to the result of the calculation and analysis, we can reasonably control the surface errors and assembly errors in the microscope object system.
Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography

Lu Sen,Yang Kaiming,Zhu Yu,Wang Leijie,Zhang Ming,Yang Jin

DOI: https://doi.org/10.3788/aos201737.1012006

2017-01-01

Abstract:Exposure result of scanning beam interference lithography (SBIL) system is closely related to the movement property of the stage. The stage adopts coarse-fine dual stage mechanism to fabricate large-area plane grating with nanometer accuracy. The fine stage is the key point of the movement accuracy of the stage. According to the principle of SBIL, the relationship between interference fringe period measurement accuracy and exposure contrast is deduced. For the period measurement method of interference fringe by moving beam-splitter, the positioning accuracy index of the fine positioning stage is analyzed by considering period measurement accuracy requirements. A controller design method is proposed to realize the positioning accuracies of the degrees of freedom in x, y, θz directions. And the experiment is conducted in the fine positioning stage system. The results show that the positioning accuracy of x, y, θz can achieved ±1.51 nm, ±5.46 nm and ±0.02 μrad, respectively, which can satisfy the SBIL exposure requirements and the interference fringe period measurement accuracy requirements.
Laser Automatic Thick-Film Element Photoetching System

TL CHEN,QR LU,SH CHEN,XM DENG

DOI: https://doi.org/10.1117/12.144171

1993-01-01

Abstract:By using micro-computer controlled stepmotor, we made the laser beam scan in accordance with the pattern of the thick-film element, and measured its resistance at the same time. The resistance value precision can reach 10-4.
Study on some key technique of large scale laser measuring machine

Jiubin Tan,Weiqian Zhao,WenGuo Yang

2000-01-01

Abstract:The paper introduces a new type of super-precision measuring instrument -7 meters laser measuring machine. This instrument can be used to measure large dimensional parts and standard gauges of less than 7 meters which are usually used in heavy machinery and power stations. A series of important techniques for improving the accuracy of the measuring machine are presented, such as a special optical path arrangement for decreasing the turbulence, integrative and high stiffness basement, multi-point auto-adjustable support and error compensation system etc.. Error analysis and actual verifications indicate that measuring accuracy of this instrument reaches ±(0.3+0.7×10 -6 L) (L:μm).
Computer-Controlled Temperature Measurement System for the Small Exposed Region in Laser Assisted Microprocessing

吴云峰,叶玉堂,吴泽明,杨先明,秦宇伟

DOI: https://doi.org/10.3321/j.issn:0258-7025.2004.03.027

2004-01-01

Chinese Journal of Lasers

Abstract:In laser assisted microprocessing, the temperature distribution in the small exposed region is the main parameter. The temperature distribution should not be influenced by the measurement. Therefore the remote sensing of the temperature distribution in the small exposed region is needed. So a computer-controlled temperature measurement system has been developed. The system can realize the real time temperature measurement of the small laser-exposed region nonintrusively. In the system, a InGaAs/InP photodiode converts the radiation from the small high temperature region into photocurrent. Then the photocurrent is amplified, and converted into digital data. Combining with calibration experiment, the computer calculates the temperature through interpolation. The system can reach a temperature resolution of 0.2℃. The measurement region diameter of 18 μm is also obtained. At the same time, algorithm has been designed to cooperate the move of the motorized stage and the acquisition of temperature data. It follows that the measurement of temperature distribution and the accurate location of the highest temperature region are realized.
Design and Implement of Nanosecond Laser Micromachining System

Liu Chunyang,Fu Xing,Wu Yong

DOI: https://doi.org/10.3969/j.issn.1000-372X.2008.03.009

2008-01-01

Applied laser

Abstract:The design of nanosecond laser micromachining system is presented,including the role,the function and the principle of every part,the hardware design of the system based on DSP and FPGA is also introduced.The experiments focused on the repetition rate,the energy of the laser and the speed of the two dimensional mechanical platform are analyzed.By resolving the problem on the cooperation of the control of the laser and the platform movement,good performance can be achieved with high accuracy.Above all,the system is simple,convenient control,stability and reliability in micromachining.
Practical measuring system on laser beam quality

Ningsi You,Yujing Huo

1997-01-01

Abstract:A practical beam quality measuring system was developed. In this system, CCD is used to record the spatial distribution of light intensity and computer is used to calculate and evaluate the beam quality. The hardware and software of the system are described in detail. The error analysis and measurement result are given.
A Measurement System for Step Imprint Lithography

HZ Liu,BH Lu,YC Ding,DC Li,YP Tang,T Jin

DOI: https://doi.org/10.4028/www.scientific.net/kem.295-296.107

2005-01-01

Key Engineering Materials

Abstract:A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of imprint lithography stage. To successfully accomplish nanometer-scale pattern transfer from mold to resist film on the wafer, two types of positioning methods, static and dynamic, are used in this system. Two laser interferometers, two optical reflection mirrors and special structure on the stage with 3 elastic tracks are employed in this system to detect the positions and rotations of the stage. Through an algorithm, measurements of pitch, yaw and roll motions can be achieved. This system can realize on-line position detecting. Based on adjusting of PZTs, the detecting precision can reach 10nm and ±3 milli-arcsec, respectively. The measuring range can reach 100mm and ±10 arcsec, respectively.
A Chip Tuneable Laser Developed for On-Line Micro–nano Scale Surface Measurements

Shuming Yang,Xiangqian Jiang,Graeme Maxwell,Richard Wyatt,Dave Rogers

DOI: https://doi.org/10.1088/0957-0233/21/10/105901

2010-01-01

Abstract:The demand for accuracy and precision at the micro-nano level is constantly increasing in the manufacture of high added value products. This requires control and measurement of the surface structure since surface properties at such tiny scales are the dominant functional determinant. Many commercial instruments have been used for surface measurements. However, these devices are almost always operated in an off-line environment, and are not suitable for on-line application. This paper presents a new interferometry system consisting of a chip tuneable laser for future on-line micro-nano scale surface measurements. It is simple, compact and robust as most environmental noise and disturbance can be eliminated without any servo control system due to the near common path configuration and the compact construction. The experimental results show that this system has good performance, and there is scope to improve this if the performance of the laser is enhanced.
Development of Laser Peening Scanning System for Large Workpieces

Xiongchao YU,Yongxiang HU,Zhenqiang YAO

DOI: https://doi.org/10.16080/j.issn1671-833x.2018.07.084

2018-01-01

Abstract:A laser peening scanning system for large workpieces is developed to apply in large workpieces laser peening and to control the laser spots quality in the process. It is composed of a high-energy nanosecond laser as the laser source, a laser spot adjusting part to control the shape and size of the laser spots, a two-axis galvanometer part to guide the scanning laser and a flexible pre-bending fixture to fix and elastically pre-bend the workpiece. Based on the characteristic of laser peening, the control process of the system is designed. An experiment to verify the laser spot quality control abil-ity of the system is conducted. It is concluded that corrected by the laser spot adjusting part based on a pair of orthogonal cylindrical lenses, the laser spots on the workpiece generally meet the proposed demand and their sizes and shapes are well controlled.
Design and Simulation for the Electron Optical System of Micro-Beam X-ray Source

LIU Ji,FAN Yu-feng

DOI: https://doi.org/10.3969/j.issn.1002-8935.2008.05.008

2008-01-01

Abstract:A structure of micro-beam X-ray source electron optical system with field emission cathode is presented in this paper firstly.The system is simulated and analyzed by using numerical simulation.After structure optimizing,the micro-beam X-ray source electron optical system is obtained with emission current about 80 μA and focus radius about 3.2 μm.This structure is simple,small volume,and can be used as one of the choices for micro-beam X-ray source producing.
Electronic Control System For Laser Tweezers & Scissors Workstation

Dongping Zhao,Yaoyao Liu,Anpei Ye

DOI: https://doi.org/10.1109/CISP-BMEI.2018.8633023

2018-01-01

Abstract:Laser tweezers can capture and move small particles. It has advantages such as non-contact and non-invasive, which make it very useful in biology, medicine, materials fields. Laser scissors or laser micro-beam can perforate or cut biological tissue with sub-micron accuracy. A workstation combining the two technologies together acting as a cellular operating lab is introduced in this paper. Our system features a multifunctional and user-friendly control software, which make the system effective and convenient. Based on this control program both laser tweezers and scissors can be operated with a computer automatically. In addition, some self-developed devices such as PZT drivers and photodetector give the system a high performance in accuracy and stability. All these make our system convenient, multifunctional and powerful.
Laser CCD Micro-displacement Measurement System Studies Based on Michelson Interferometer

赵育良,王淑娟

DOI: https://doi.org/10.3969/j.issn.1671-1815.2010.07.010

2010-01-01

Abstract:An laser system for testing dynamic micro-displacement automatically is introduced.The system is taking He-Ne laser as light source,deploies the system of eliminating noise,the system of frequency conversion and differentiating direction,the high speed development of CCD video signal gather system,the processing system of personal computer and interference picture handling software wraps,the system realize accurate measurement of micro-displacement based on phase modulation.Its precision,error,sensitivity and stability have greater raising than traditional measurement technique,the full automatic measure of micro-displacement is realized.
Machine learning based laser homogenization method

Xu Zhang,Jin-Min Ding,Chen-Yang Hou,Yi-Ming Zhao,Hong-Wei Liu,Sheng Liang,National Physical Experiment Teaching Demonstration Center, Key Laboratory of Education Ministry on Luminescence and Optical Information Technology, School of Physical Science and Engineering, Beijing Jiaotong University, Beijing 100044, China

DOI: https://doi.org/10.7498/aps.73.20240747

IF: 0.906

2024-08-21

Acta Physica Sinica

Abstract:Author(s): Zhang Xu, Ding Jin-Min, Hou Chen-Yang, Zhao Yi-Ming, Liu Hong-Wei, Liang Sheng <sec<laser (g-s)="" (slm)="" 13%.="" a="" achieve="" address="" addressing="" affects="" aims="" algorithm="" also="" an="" and="" application="" applications="" approach="" are="" artificial="" as="" based="" beam="" beam,="" between="" by="" can="" caused="" change="" compared="" compensating="" compensation="" complicated="" component="" controlling="" corresponding="" dataset="" density.="" detection="" directionality,="" discrepancies="" distribution="" due="" efficient="" encounter="" energy="" energy,="" energy.="" error="" errors="" errors,="" establishes="" existing="" expected="" experimental="" experiments.="" fail="" fields="" fields.<="" flexibility.="" for="" from="" furthermore,="" gaussian="" generate="" generated="" gerchberg-saxton="" guidance="" high="" hologram="" homogenization="" homogenization.="" homogenized="" however,="" images="" images.="" imaging,="" improving="" in="" incident="" inherent="" intelligence="" intensity="" interaction="" interference,="" into="" is="" it="" its="" laser="" leading="" learning="" learning-based="" light="" limitations="" machine="" manipulation.="" mapping="" matter.="" means="" method="" method.="" methods="" methods,="" modulate="" modulator="" monochromaticity,="" necessary="" non-uniform="" non-uniformity="" of="" on="" optical="" p="" phase="" poor="" possesses="" precisely="" preliminary="" preparation="" prevents="" problems="" problems.<="" processing,="" proposed="" provide="" reduces="" reference="" regression="" relationships="" reshape="" restrict="" results="" results.="" sec<<="" sec<<sec Acta Physica Sinica. 2024 73(16): 164205. Published 2024-08-20</sec

physics, multidisciplinary
Design and study on a nanometer order accuracy optical-path-splitting two-frequency interferometer measuration system

GE Yang-xiang,WANG Dong-sheng,LI Yu-he,LI Qing-xiang

DOI: https://doi.org/10.3321/j.issn:1002-1582.2006.05.001

2006-01-01

Optical Technique

Abstract:In order to implementation of the quick and exact surface topography detection,a novel nanometer order accuracy optical-path-splitting two-frequency interferometer measuration system was developed.The system comprises low frequency-difference two-frequency laser interferometer measuration module,micro-detection device and two dimension platform.The microprobe,approaching example surface in tap mode until several tens nanometers to surface,generates inclination because of atom force.Two-frequency interferometer module was utilized to measure longitudinal inclination.The system measured the example in honeycomb mode in order to obtain surface topography.The Two-frequency interferometer measuration theory was improved according to laser source in reality.After all,the system was put up.The experiment is actualized to verify the system performance.The experimental results show that the device has the accuracy of nanometer order,satisfies performance requirements for the superfinish surface topography detection.
Stability research of laser confocal probe for measuring the micro-shpere

Ting Wang,Yu Zhu,Kaiming Yang

DOI: https://doi.org/10.4028/www.scientific.net/AMM.52-54.818

2011-01-01

Abstract:Laser confocal probe, on an active focus adjusting principle, was introduced in this paper. This kind of non-contact laser probe has the abilities to do the detection on strong reflection of the surface of high precision metal parts and optical devices. So, a problem of shape inspection detection was resolved. The micro-sphere is the key element in the ICF (short for inertial confinement fusion) system. The success or failure of "Ignition" is directly related to the accuracy of the assembly location of micro-sphere in the micro-target. Because of the particularity of the micro-sphere, laser confocal probe is used to do the detection of the center error of micro-sphere. The required measurement precision is less than 3 mu m. The mathematical formula between the height defference or the displacement value of measured surface and the displacement valued of the tuning fork can be gotten by the time different principle. Good stability of frequency and the swing of tuning fork, which approved through the experiments, have little influence to the time different Delta t and the final measurement results.

Laser stage system for sub-micron E-beam exposure machine

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

A Straightness Measurement System Using a Single-Mode Fiber-Coupled Laser Module

Intelligent Measuring System for Performance Parameters of Laser Range Finder

Melt Level Measurement for the CZ Crystal Growth Using an Improved Laser Triangulation System

Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography

Laser Automatic Thick-Film Element Photoetching System

Study on some key technique of large scale laser measuring machine

Computer-Controlled Temperature Measurement System for the Small Exposed Region in Laser Assisted Microprocessing

Design and Implement of Nanosecond Laser Micromachining System

Practical measuring system on laser beam quality

A Measurement System for Step Imprint Lithography

A Chip Tuneable Laser Developed for On-Line Micro–nano Scale Surface Measurements

Development of Laser Peening Scanning System for Large Workpieces

Design and Simulation for the Electron Optical System of Micro-Beam X-ray Source

Electronic Control System For Laser Tweezers & Scissors Workstation

Laser CCD Micro-displacement Measurement System Studies Based on Michelson Interferometer

Machine learning based laser homogenization method

Design and study on a nanometer order accuracy optical-path-splitting two-frequency interferometer measuration system

Stability research of laser confocal probe for measuring the micro-shpere