An Algorithm on Laser Measurement Model of Ultra-precision Motion Stage and Error Compensation

Teng Wei,Zhou Yunfei,Mu Haihua,Yang Liangliang
DOI: https://doi.org/10.3321/j.issn:1004-132X.2009.12.024
2009-01-01
Abstract:The reasons of Abbe error and cosine error were analyzed in laser measurement. Then the effect of Abbe error and cosine error on measurement optical path was discussed as two instances: an ideal model of interferometer without rotation & tilt and a non-ideal model of interferometer with them. The optical path was calculated separately. Next, a model whose x-y translation value will not be affected by the tilt & rotation of motion stage and a 5-DOF laser measurement algorithm were concluded. Finally, experimental results demonstrate the effectiveness and reliability of the proposed algorithm. The presented algorithm has been applied in semiconductor manufacturing equipment successfully.
What problem does this paper attempt to address?