An algorithm for the compensation of geometrical error in laser interferometer measurement

WEN Xin,ZHOU Yun-fei,MU Hai-hua,TENG Wei

DOI: https://doi.org/10.3969/j.issn.1001-3997.2011.09.018

2011-01-01

Abstract:As one of important measuring means,laser technology is widely used in precision motion control system.The accuracy of the motion control system is often limited by the errors occurs during the laser measuring,especially for the geometrical errors,such as abbe error and cosine error,which should be corrected in precision servo control.Based on four laser interferometers measurement model of precision mo-tion stage,the reasons of abbe error and cosine error are introduced.Without consideration of machining er-rors and installation errors,the calculation models of geometrical errors of one interferometer for tilt of the motion stage is derived,and the data error compensation model of the laser measurement is deduced.The proposed algorithm could be used to compensate the data of the four interferometers generally under imper-fect situation.Finally,this method is successfully used in practice,which demonstrates the effectiveness and reliability of the proposed algorithm.