Error Analysis and Compensation in Laser Interferometry

LIU Jun,MU Haihua,SUN Yeye,ZHOU Yunfei
DOI: https://doi.org/10.3969/j.issn.1001-3881.2006.09.064
2006-01-01
Abstract:The measuring principle of dual-frequency laser interferometer was introduced.On the basis of process of installation and measurement,the inherent error of interferometer,the Abel error and cosine error,the environmental error and the delay error were analyzed.The effect of these errors upon the measurement was discussed.And the compensation methods for the primary error were given.
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