Abstract:In this paper, by constructing a 3-DOF (Degrees of freedom) laser interferometer on each displacement axis of motion, the main errors during the coordinate measuring machines (CMM) motion are dynamically monitored. The 3-DOF laser interferometer is composed of three-beam dual-frequency laser interferometers, and each dual-frequency laser interferometer obtains the reflection signal through a corner cube reflector. By determining the position parameters of the three corner cube reflectors and three sets of feedback signals, the 3-DOF laser interferometer can calculate the three parameters, i.e., the axial displacement and the lateral pitch and yaw angles. The device is installed on each motion axis of the CMM to monitor 9 major errors during the whole motion system. Laser signals are used to track position information by establishing the rigid body transformation relationship. Therefore, the 9 errors can be updated in real time through the monitoring system to replace the calibration results to calculate the probe position. The position error of the CMM probe caused by the dynamic error is simulated. Monte Carlo method is employed to obtain the error situation and monitor the residual error distribution throughout the measurement movement process. The errors can be corrected immediately without recalibrating the CMM error parameters especially when the dynamic error changes significantly. In addition, environmental errors are also introduced in the model to analyze the impact on the accuracy of position monitoring. The method proposed can reduce the position monitoring error within 0.1 mu m. Using this method, the error source of a dynamic error monitoring system can be designed in a simulated environment, which can be used as the basis for the design of the dynamic error monitoring system.

Study on Dynamic Error Compensation of Laser Emitter for Digging Navigation System

Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

Graded Error Compensation Method for Heavy-Load Manipulators Based on Laser Tracking Measurement

Method for Active Spatial Alignment and Stabilization of Laser Beams in Multi-Beam Systems

Measuring Straightness Method with Common Path Compensation for Laser Drift

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

Laser Collimation Method Based on Differential Compensating Beam Drift

A Straightness Measurement System Using a Single-Mode Fiber-Coupled Laser Module

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

Positioning accuracy improvement method of industrial robot based on laser tracking measurement

Error Correction Of Laser Scanning System For Reverse Engineering

A Novel Laser Tracking Testbed For Robot Trajectory Errors

Theoretical Ranging Performance Model That Considers Laser Pointing Errors for Laser Ranging Systems in Detecting Diffusely Reflecting Targets

Error Modeling and Compensation of Circular Motion on a New Circumferential Drilling System

An algorithm for the compensation of geometrical error in laser interferometer measurement

Modeling And Simulation Of Dynamic Errors In A Coordinate Measuring Machine With 3-Dof Laser Interferometer

Shafting error parameters identification and compensation of non-orthogonal laser theodolite without reference end on laser axis

Research on the Error Measurement and Error Compensation Technology for CNC Machine Tools

Machine learning-based error compensation for high precision laser arbitrary beam splitting

Research on the Position Error Compensation of Linear Motor

Laser pointing error analysis and compensation method of low-power laser diode source applied to triangulation ranging system