Research on the Position Error Compensation of Linear Motor

Ji-lei JIA,Hui CHEN,Jian-zhong FU
DOI: https://doi.org/10.3969/j.issn.1001-4551.2005.07.005
2005-01-01
Abstract:It is presented that the position errors of linear motor drive were measured by twice frequency laser interference principle. Using the linear fitting by least square method, the compensated model of linear expression, segmentation linear expression and spline fit were established, and the position error was compensated. The results show that it can considerably improve the linear motor position accuracy by software compensation.
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