A Method of Calculating Structural Error in Interferometer Measurement System

Jianzhang Cui,Ming Zhang,Yu Zhu,Chang Ni
DOI: https://doi.org/10.12783/dtcse/itms2016/9471
2017-01-01
DEStech Transactions on Computer Science and Engineering
Abstract:We presented a new method of calculating structural error in interferometer measuring system. The position error and angle error of the light beam caused by each component can be respectively calculated and analyzed. Preliminary simulation and validation have been carried out and further study will be done in the future.
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