Investigation Of Zro2(Ce4+) Thin Film For Oxygen Sensor

Gl Tan,Yq Wang,Hf Zhang,Xj Wu
DOI: https://doi.org/10.1117/12.293526
1997-01-01
Abstract:The ionic conductivity and sensitivity of a series of Ce4+-doped zirconia thin film synthesized by sol-gel process are studied, The conductivity of the film is mainly depended on the doping ions and its concentration. The result shows that the ZrO2(Ce4+) solid solution is well suited to maintain the ionic conductivity in a wide composition range. A physical model has been proposed to explain the high sensitivity of the thin film.
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