Fabrication of YSZ Ceramic Thin Films with Sol-Gel Method for Mixed Potential-Type Zirconia-Based NO2 Sensor
Jianyu Zhang,Huaiyuan Sun,Lin Shu,Lingchu Huang,Bin Wang,Qi Lu,Dawei Yan,Xishuang Liang,Fengmin Liu,Fangmeng Liu,Geyu Lu
DOI: https://doi.org/10.1016/j.ceramint.2023.12.385
IF: 5.532
2024-01-01
Ceramics International
Abstract:In this work, yttria-stabilized zirconia (YSZ) thin films were prepared by sol-gel and spin-coating methods, which are simple and inexpensive, with good film quality and excellent electrical conductivity. Using this film, a YSZ film mixed-potential type NO2 gas sensor with NiO as the sensitive electrode material was fabricated. The films had the best dielectric properties when spin-coated four times, and the sensors had the highest response (48 mV-100 ppm NO2) as well as the best sensitivity (14.8 mV/decade for 5-20 ppm NO2 and 42 mV/decade for 20-500 ppm NO2). The YSZ thin-film gas sensor operates at a lower temperature, with an optimum operating temperature of 550 degree celsius, and the power consumption of the sensor has been reduced by approximately 46 % or more compared to conventional bulk YSZ NO2 gas sensors. This provides a very effective direction for the low-power design of high-temperature devices such as the YSZ gas sensor. In addition, thin-film devices are more conducive to integrating sensors into microelectronic circuits, greatly improving the application scenarios for such devices. This sensor has excellent repeatability, very good selectivity, and outstanding long-term stability over 30 days of continuous measurement. In conclusion, based on the excellent sensing performance and low power consumption of the YSZ thin-film gas sensor, the sensor has a promising future for in-situ monitoring of NOx.