Effect of ZrO2 dopant on the electrical and gas sensing properties of SnO2 thin films prepared by the sol-gel technique

Guojia Fang,Zuli Liu,Jie Zhang,Kailun Yao
1997-01-01
Abstract:SuO2(ZrO2) thin films with different dopant concentrations were deposited on soda-glass sheets by the Sol-Gel technique, using non-alkoxide SnCl2��2H2O as main precursor, Zr(OC3H7)4 as dopant, ethanol as solvent. The effect of ZrO2 dopant concentration on the electrical and gas sensing was studied. We found that the ZrO2-SnO2 thin films prepared by this method have very good gas sensitivity, excellent selectivity, rapid response and recovery behaviour to HoS at room temperature.
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