Effects of CeO2 Doping on Gas Sensing Properties of ZnO Thin Films

JI Li,YANG Jing,LI Jian
DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.07.018
2011-01-01
Abstract:The doping effect of CeO2 in thin films structure,topography,grain size and gas sensing properties of ZnO thin films is investigated.The polycrystalline thin films with c-axis orientation can be obtained after thermal vacuum evaporation.The doping behavior can refine the grain size,simultaneously reduce the stoichiometric ratio from Zn∶O=1∶1.28 down to Zn∶O= 1∶1.191.The XPS results show that Zn existed as +2 and O as-2 states.Additionally,CeO2 doping can dramatically enhance the sensitivities to ethanol and acetone,reaching up to 35 and 40,respectively.
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