Photoluminescence of a Silicon Oxide Film Formed by Anodization in the Electropolishing Region in HF Solution

XY MA,LD CHEN,ZG JI,HN YAO,DL QUE
DOI: https://doi.org/10.1088/0953-8984/7/14/026
1995-01-01
Journal of Physics Condensed Matter
Abstract:This paper reports the photoluminescence (PL) Of a silicon oxide film formed by anodization in the electropolishing region in HF solution. The PL is preliminarily believed to be due to certain light-emitting centres in the silicon oxide film. In addition, the paper suggests that not all the PL of anodized silicon formed in HF solution can be solely ascribed to the porous silicon.
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