Models of Material Parameters for Strained Si/sub 1-X/ge/sub X/ Layers and Study of Hot-Carrier Transport and High Frequency Performance of Si/SiGe HBT

WG Wu,WR Zhang,Z Zeng,JS Luo
DOI: https://doi.org/10.1109/icsict.1995.500238
1995-01-01
Abstract:In this paper, the models of material parameters for strained Si/sub 1-x/Ge/sub x/ layers grown on <100> Si substrate and the hydrodynamics model (HDM) for Si/Si/sub 1-x/Ge/sub x/ heterojunction system are developed. Based on these models, the hot-carrier transport and high frequency performance of Si/SiGe HBT are simulated numerically. The factors that affect the cut-off frequency f/sub T/ and the optimum doping profile to improve it are discussed in detail and obtained.
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