Study on chemical states of surface and interface of materials by Auger chemical effect

Yongfa Zhu,LiLi Cao,Wenqing Yao
1995-01-01
Abstract:The chemical states of surface and interface of three film materials were studied by Auger chemical effect. The results showed that the Sb implanted by high energy ions reacts with SnOx and forms SbSnOx species. The valence electron of Sb 5p orbit immigrates into Sn 5s orbit and the electronic conductivity of tin oxide film increases. The selective absorption film of solar light is composed of AlNxOy species. The existence of free Si in Si3N4 film can induce the oxidation of the film.
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