OPTICAL AND ELECTRICAL PROPERTIES OF SnO2:Sb THIN FILMS DEPOSITED BY SOL-GEL PROCESS

史金涛,赵高凌,杜丕一,韩高荣
DOI: https://doi.org/10.3321/j.issn:0254-0096.2003.01.002
2003-01-01
Abstract:In the solution of metal salts-SnCl2·2H2O and SbCl3, the transparent and conductive thin films of antimony doped tin oxide have been prepared by the sol-gel dipping. Electrical properties such as sheet resistance, Hall mobility, number and type of carriers were analyzed. Optical properties were investigated by the spectral transmission, reflection and the width of the gap of the coatings. XPS analysis shows antimony doping exists mainly as Sb5+. The sheet resistance of the films can be as low as 850 Ω/€, and the Hall mobility was found between 2.5 and 3.6 cm2V-1s-1. The visible transmission is about 85% and reflection is below 15% as the film thickness up to l μm.
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