Study on the effect of Sn concentration on the structural, optical, and electrical properties of (Al 0.55 In 0.45 ) 2 O 3 :Sn films

Yangmei Xin,Dong Zhang,Zizhan Li,Hua Qin,Junshan Xiu,Zhao Li,Yunyan Liu,Huiqiang Liu
DOI: https://doi.org/10.1039/d0nj06088g
IF: 3.3
2021-01-01
New Journal of Chemistry
Abstract:The MOVPE method is applied to deposit the (Al 0.55 In 0.45 ) 2 O 3 :Sn films with high mobility as well as low resistivity.
chemistry, multidisciplinary
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