Intrinsic Ge Nanowire Nonvolatile Memory Based on A Simple Core-Shell Structure

Wen-Hua Chen,Chang-Hai Liu,Qin-Liang Li,Qi-Jun Sun,Jie Liu,Xu Gao,Xuhui Sun,Sui-Dong Wang
DOI: https://doi.org/10.1088/0957-4484/25/7/075201
IF: 3.5
2014-01-01
Nanotechnology
Abstract:Intrinsic Ge nanowires (NWs) with a Ge core covered by a thick Ge oxide shell are utilized to achieve nanoscale field-effect transistor nonvolatile memories, which show a large memory window and a high ON/OFF ratio with good retention. The retainable surface charge trapping is considered to be responsible for the memory effect, and the Ge oxide shell plays a key role as the insulating tunneling dielectric which must be thick enough to prevent stored surface charges from leaking out. Annealing the device in air is demonstrated to be a simple and effective way to attain thick Ge oxide on the Ge NW surface, and the Ge-NW-based memory corresponding to thick Ge oxide exhibits a much better retention capability compared with the case of thin Ge oxide.
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