Abstract:At present, computer simulation has become an important researching tool for thin film growth as one of theory method, which can be used to understand the mechanism of thin film growth at atom level. Now, most of simulations about thin film growth are about two dimensional and the object of simulation is only one kind of atom, such as Cu, Al, or Si on different substrate, and the work about simulation of oxide thin film growth is much less. However, many oxide thin films are playing very important role in electronic application because of their unique properties as functional materials, so it need to better understand the growth kinetics of oxide thin films. A new model for simulation of the growth of PbTiO3 (abbreviated as PTO) thin film basing on kinetic Monte Carlo method has been developed in this paper. A pack of simulation software for PTO was developed. From the simulation it is obtained that the deposition rate and the substrate temperature play a very important role in the initial process of growth of PTO thin film, and with the rising of the substrate temperature and the decreasing of deposition rate, the size of the initial nucleuses gets larger and the number of them in unit area gets less. And with advance of modern instrument, it's possible to get the morphology of ABO(3) structure thin films at its initial stage of growth by STM to test and improve our model. The related experimental work is at hands.

The Growth Simulation of Ti Thin Film Onto Si Substrate

Monte Carlo simulation of the growth of Sc thin films on Si substrate

Simulation of surface morphology for Sc thin film in the initial growth stage

Growth and Properties of Cu Thin Film Deposited on Si(001) Substrate: A Molecular Dynamics Simulation Study

A Three-Dimensional Atomic Scale Simulations of CVD-SiC Film Growth in {1 1 1}, {1 1 0} and {1 0 0} Family of Planes

Monte Carlo simulation of the growth of SrTiO3 thin film with molecular source

Application of Computer: Monte Carlo Simulation of Thin Film Growth

Simulation of the Growth of PbTiO_3 Thin Film by Monte Carlo Method II:results and Discussion

The Growth, Surface Topography and Curie Temperature in Ni Thin Films: Kinetic Lattice Monte Carlo Simulation

Simulation of Si Film Growth on Si(100)-(2×1) Surface

Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth

A Computer Simulation of Nucleation and Growth of Thin Films

Simulation of the hetero-eptiaxial growth of oxide thin films

Monte Carlo Simulation Of Growth Of Pbtio3 Oxide Thin Films

Monte Carlo simulation and study of thin film growth process

Monte Carlo Simulation of Cu Thin Films Growth Process

Molecular Dynamics Simulation of Deposition and Growth of Cu Thin Film on Si Substrate

Atomic Scale Simulation of {111}-Oriented SiC Film Growth by Chemical Vapor Deposition Method: Atomic Scale Simulation of {111}-Oriented SiC Film Growth by Chemical Vapor Deposition Method

A Molecular Dynamics Simulation of TiN Film Growth on TiN(0 0 1)

THE GROWTH SIMULATION OF ABO3 TYPE EPITAXIAL THIN FILMS

Progress of Monte-Carlo Simulation of the Growth of Thin Films by Physical Vapor Deposited