Abstract:Silicon nanowires (SiNWs) are appealing building blocks in various applications, including photovoltaics, photonics, and sensors. Fabricating SiNW arrays with diameters <100 nm remains challenging through conventional top-down approaches. In this work, chemical etching and thermal oxidation are combined to fabricate vertically aligned, sub-20 nm SiNW arrays. Defect-free SiNWs with diameters between 95 and 200 nm are first fabricated by nanosphere (NS) lithography and chemical etching. The key aspects for defect-free SiNW fabrication are identified as: (1) achieving a high etching selectivity during NS size reduction; (2) retaining the circular NS shape with smooth sidewalls; and (3) using a directional metal deposition technique. SiNWs with identical spacing but variable diameters are demonstrated by changing the reactive ion etching power. The diameter of the SiNWs is reduced by thermal oxidation, where self-limiting oxidation is encountered after oxidizing the SiNWs at 950 °C for 1 h. A second oxidation is performed to achieve vertically aligned, sub-20 nm SiNW arrays. Si/SiO2 core/shell NWs are obtained before removing the oxidized shell. HRTEM imaging shows that the SiNWs have excellent crystallinity.

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Ultrafast growth of single-crystalline Si nanowires

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Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Large-scale Synthesis of Water-Soluble Nanowires As Versatile Templates for Nanotubes.

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

Array-orderly single crystalline silicon nano-wires

Silicon Nanowire Synthesis by Chemical Vapor Deposition

Tiny silicon nano-wires synthesis on silicon wafers

Low-Temperature Molten-Salt Production of Silicon Nanowires by the Electrochemical Reduction of CaSiO3

Highly Efficient Synthesis of Silicon Nanowires from Molten Salt Electrolysis Cell with a Ceramic Diaphragm

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Synthesis of Large-Area Silicon Nanowire Arrays Via Self-Assembling Nanoelectrochemistry

OS1503 Development of Highly Ordered Silicon Nanowire Array

Synthesis of Ordered Si Nanowire Arrays in Porous Anodic Aluminum Oxide Templates

Fabricating Vertically Aligned Sub-20 Nm Si Nanowire Arrays by Chemical Etching and Thermal Oxidation

Wafer-scale Fabrication of Silicon Nanowire Arrays with Controllable Dimensions

A Facile and Universal Way to Fabricate Superlattice Nanowire Arrays.

Nanoscale Silicon Wires Synthesized Using Simple Physical Evaporation

One-step Synthesis Route of the Aligned and Non-Aligned Single Crystalline Α-Si3n4 Nanowires