Oxidation Stress Evolution and Relaxation of Oxide Film/Metal Substrate System

Xuelin Dong,Xue Feng,Keh-Chih Hwang
DOI: https://doi.org/10.1063/1.4736934
IF: 2.877
2012-01-01
Journal of Applied Physics
Abstract:Stresses in the oxide film/metal substrate system are crucial to the reliability of the system at high temperature. Two models for predicting the stress evolution during isothermal oxidation are proposed. The deformation of the system is depicted by the curvature for single surface oxidation. The creep strain of the oxide and metal, and the lateral growth strain of the oxide are considered. The proposed models are compared with the experimental results in literature, which demonstrates that the elastic model only considering for elastic strain gives an overestimated stress in magnitude, but the creep model is consistent with the experimental data and captures the stress relaxation phenomenon during oxidation. The effects of the parameter for the lateral growth strain rate are also analyzed.
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