Surface Evolution At Nanoscale During Oxidation: A Competing Mechanism Between Local Curvature Effect And Stress Effect

Xufei Fang,Yan Li,Dan Wang,Siyuan Lu,Xue Feng
DOI: https://doi.org/10.1063/1.4947182
IF: 2.877
2016-01-01
Journal of Applied Physics
Abstract:The process of surface evolution of a chemically etched stepped structure at nanoscale during oxidation at 600 degrees C is in situ and real time observed using scanning probe microscope, which is integrated in a nanoindentation equipment for high temperature test. Experimental results reveal that this curved stepped structure becomes flat after being oxidized for a short period of time. However, after a longer time of oxidation, it is observed that the originally flat surface near the stepped structure becomes rough. Analysis shows that such a surface evolution is attributed to the competition between the nanoscale curvature effect (related to surface energy) and the stress developed in the oxide film during oxidation (related to strain energy). It is demonstrated that both the surface energy and strain energy can modify the surface chemical potential, which acts as the driving force of the surface diffusion of oxygen and further affects the oxide formation on the surface. Published by AIP Publishing.
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