Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Fabrication of a Glass Microfluidic Device Integrated with Ultrasonic Resonators

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication Of Microfluidic Chips By An Ultrasonic Micromachining With Wet-Etch Smoothing Method On Glass Substrates

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

Fabrication Of Microfluidic Devices In Silica Glass By Water-Assisted Ablation With Femtosecond Laser Pulses

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Fabrication of microchannels by space-selective control of phase separation in glass.

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Fabrication of micro fluidic cavities using Si-to-glass anodic bonding

Fabrication and Analysis of a Fabry-Perot Cavity with a Micromechanical Wet-Etching Process.

Fabrication and testing of microfluidic optomechanical oscillators

Fabrication of Three-Dimensional Microfluidic Channels in Glass by Femtosecond Pulses

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.