Natively Textured Surface Aluminum-Doped Zinc Oxide Transparent Conductive Layers for Thin Film Solar Cells Via Pulsed Direct-Current Reactive Magnetron Sputtering

Xin-liang Chen,Lin-na Li,Fei Wang,Jian Ni,Xin-hua Geng,Xiao-dan Zhang,Ying Zhao

DOI: https://doi.org/10.1016/j.tsf.2012.03.120

IF: 2.1

2012-01-01

Thin Solid Films

Abstract:Natively textured surface aluminum-doped zinc oxide (ZnO:Al) layers for thin film solar cells were directly deposited without any surface treatments via pulsed direct-current reactive magnetron sputtering on glass substrates. Such an in-situ texturing method for sputtered ZnO:Al thin films has the advantages of efficiently reducing production costs and dramatically saving time in photovoltaic industrial processing. High purity metallic Zn–Al (purity: 99.999%, Al 2.0wt.%) target and oxygen (purity: 99.999%) were used as source materials. During the reactive sputtering process, the oxygen gas flow rate was controlled using plasma emission monitoring. The performance of the textured surface ZnO:Al transparent conductive oxides (TCOs) thin films can be modified by changing the number of deposition rounds (i.e. thin-film thicknesses). The initially milky ZnO:Al TCO thin films deposited at a substrate temperature of ~553K exhibit rough crater-like surface morphology with high transparencies (T~80–85% in visible range) and excellent electrical properties (ρ~3.4×10−4Ωcm). Finally, the textured-surface ZnO:Al TCO thin films were preliminarily applied in pin-type silicon thin film solar cells.