Measurement of Soft X-Ray Grazing Incidence Optical Scattering Phenomena

Chen Shu-yan,Cheng Li,Xu Xin-jun
DOI: https://doi.org/10.1117/12.971318
2017-01-01
Abstract:The optical performance is severely degraded by surface scattering effect, especially for short wavelength imaging systems. Surface scattering effect is one of important factors degrading imaging performance. Study of non-intuitive surface scattering effect resulted from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, a surface scattering numerical model of grazing incidence imaging systems is discussed. Then Soft X-ray optical scattering distribution is measured by soft X-ray reflectometer at different conditions. PSF (point spread function) is computed by experimental data of sample, and compared with PSF analysized by scattering LSI model. It is indicated that we can detect short wavelength optical scattering Phenomena through soft X-ray grazing incidence optical scattering experimentation we did.
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