Mobility spectrum analysis of p-to-n type converted vacancy doped HgCdTe

Kala, H.,G. A. Umana-Membreno,Jarek Antoszewski,Zhenhua Ye,W. D. Hu,R. J. Ding,Xiaoshuang Chen,Li He,John M. Dell,Lorenzo Faraone
DOI: https://doi.org/10.1109/COMMAD.2012.6472431
2012-01-01
Abstract:Electron transport in n-type HgCdTe realised by Boron ion-implantation and inductively-coupled-plasma reactive-ion etching (ICP-RIE) of vacancy doped p-type HgCdTe has been investigated by employing variable magnetic field Hall-effect and resistivity measurements, coupled with high resolution mobility spectrum analysis (HR-MSA). Electron mobilities were found to be significantly higher in the ICP-RIE type-converted sample than in the ion-implanted sample, suggesting that type-conversion mechanisms in the two samples are significantly different.
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