Abstract:Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate knowledge on the mechanical behaviors of thin film materials used for MEMS is important for successful design and development of MEMS. Here a novel electroplating spring-bridge micro-tensile specimen integrates pin-pin align holes, misalignment compensate spring, load sensor beam and freestanding thin film is demonstrated and fabricated. The specimen is fit into a specially designed micro-mechanical apparatus to carry out a series of monotonic tensile testing on sub-micron freestanding thin films. Certain thin films applicable as structure or motion gears in MEMS were tested including sputtered gold, copper and tantalum nitride thin films. Metal specimens were fabricated by sputtering; for tantalum nitride film samples, nitrogen gas was introduced into the chamber during sputtering tantalum films on the silicon wafer. The sample fabrication method involves three steps of lithography and two steps of electroplating copper to hold a dog bone freestanding thin film. Using standard wet etching or lift off techniques, a series of microtensile specimens were patterned in metal thin films, holes, and seed layer for spring and frame structure on the underlying silicon oxide coated silicon substrate. Two steps of electroplating processing to distinct spring and frame portion of the test chip. Finally, chemical etched away the silicon oxide to separated electroplated specimen and silicon substrate.

A Novel Running-in Method for Improving Life-Time of Bulk-Fabricated Silicon MEMS Devices

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Friction and Wear of Self-Mated SiC and Si 3 N 4 in Green Water-Based Lubricant

On-chip testing method for measurements of friction and wear in moveable MEMS devices

Investigation of the running-in process of silicon nitride sliding in aqueous solutions of ethylene glycol

Characteristics of the Wear Process of Side-Wall Surfaces in Bulk-Fabricated Si-MEMS Devices in Nitrogen Gas Environment

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Effect of Surface Energy on the Wear Process of Bulk-Fabricated Mems Devices

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

A Single Crystal Silicon Based Micro-tribotester and Testing

A Micro-Tribotester for Evaluating Friction and Wear on Side Contacting Surfaces in Bulk-Microfabricated Devices

A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices

Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

Investigation of running-in process in water-based lubrication aimed at achieving super-low friction

Influence of silica nanoparticles on running-in performance of aqueous lubricated Si3N4 ceramics

Investigation of the Running-in Process and Friction Coefficient under the Lubrication of Ionic Liquid/water Mixture

Experimental Study of Tribological Performance on Silicon Micro-textured Surface

Adhesive and Corrosive Wear at Microscales in Different Vapor Environments

Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS

Friction and wear properties in MEMS

Processes-based Multistep Simulation of Thermal- mechanical Reliability of a 3D-TSV MEMS