Fabrication of the Uniaxial Stained SOI Wafer by Mechanical Bending

DAI Xianying,WANG Lin,YANG Cheng,ZHENG Ruochuan,ZHANG Heming,HAO Yue
DOI: https://doi.org/10.3969/j.issn.1001-2400.2012.03.034
2012-01-01
Journal of Xidian University
Abstract:Based on the theory of elasticity and the mechanical properties of SOI,this paper puts forward a new method to produce the uniaxially strained SOI wafer,and describes the principle of the process.The 4-in.Silicon-On-Insulater wafer under goes the mechanical-bended test on the pedestal whose curvature radius is 0.75m,and then it is annealed at 250℃ for 20 hours to achieve the uniaxial strain.The IR-transmission-unaffected-diffraction instrument and Raman spectrum instrument are used for study of the pre-bonding quality and strain degree.The frequency shift of the Raman spectrum is 520.3 cm-1.The Si peak of the strained Si layer is shifted by-0.3 cm-1 compared to the typical value.It is indicated that a compressive uniaxial strain can be obtained after bending and annealing.The comparative strain is 0.077%,higher than the value of 0.059% in the literature.
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