Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells

H. Zhu,J. Hüpkes,E. Bunte,A. Gerber,S.M. Huang
DOI: https://doi.org/10.1016/j.tsf.2010.02.065
IF: 2.1
2010-01-01
Thin Solid Films
Abstract:Mid-frequency magnetron sputtering of aluminum doped zinc oxide films (ZnO:Al) from tube ceramic targets has been investigated for silicon based thin film solar cell applications. The influence of working pressure on structural, electrical, and optical properties of sputtered ZnO:Al films was studied. ZnO:Al thin films with a minimum resistivity of 3.4×10−4Ωcm, high mobility of 50cm²/Vs, and high optical transmission close to 90% in visible spectrum region were achieved. The surface texture of ZnO:Al films after a chemical etching step was investigated. A gradual increase in feature sizes (diameter and depth) was observed with increasing sputter pressure. Silicon based thin film solar cells were prepared using the etched ZnO:Al films as front contacts. Energy conversion efficiencies of up to 10.2% were obtained for amorphous/microcrystalline silicon tandem solar cells.
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