Amorphous Silicon Periodic and Quasi-Periodic Superlattices

JF DU
DOI: https://doi.org/10.1117/12.47190
IF: 4
1991-01-01
Vacuum
Abstract:The a-Si:H based compositional periodic and quasiperiodic superlattices (SLs) have been investigated by low-angle x-ray diffraction, Auger electron spectrum (AES), and cross-section TEM micrograph experiments. We show that most of the structures have sharp and smooth interfaces to better than 6 angstrom. The results also indicate that the peculiarities of quasiperiodic a-Si:H SLs are very different from those of periodic structures. The quantum size effects in a-Si:H SLs has been verified by the wavelength differential absorption (WDA) spectrum measurements.
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