Progress in the Research of Poly-Si Film for TFT Prepared by Excimer-Laser Crystallization

Yi-jun YAN,Yong-bing DAI,Jun WANG,Bao-de SUN
DOI: https://doi.org/10.3969/j.issn.1004-3365.2006.01.020
2006-01-01
Abstract:The latest development of poly-Si film for TFT prepared by excimer-laser crystallization(ELC) method is reviewed.The super lateral growth(SLG) phenomenon in the crystallization process is introduced.Approaches to enlarging poly-Si film grain size are discussed,with emphasis on existing optics-based and lithography-based artificial controlled super lateral growth(AC-SLG) methods.
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