XPS studies on ZrO2 thin films deposited on glass substrate by sol-gel
xin gang yu,yi gong,wen yue bi,xue chun tian,hong wen ma,h f zhao,guo hong qiu,li wang
DOI: https://doi.org/10.4028/www.scientific.net/KEM.368-372.1277
2008-01-01
Key Engineering Materials
Abstract:The chemical composition and the valence state of elements on the surface of ZrO2 thin films deposited on glass substrates have been studied by X-ray photoelectron spectroscopy. Results show that: elements of Na, Mg, Zr, Ca exist in the form of their respective stable state, such as Na2O, NIgO, ZrO2, CaO, when heat treated at 500 degrees C for 0.5h; but Si is unstable, and exhibit stoichiometrical disturbances. Results of chemical composition and their content by atom percent of ZrO2 thin films surface reveal that: Si, and Ca diffuse from glass to the thin films in scale; Na diffuses few and Mg collects to the thin films surface. The diffusion of Mg2+ and Ca2+ from glass to ZrO2 thin films is negative diffusion.