Progress of Charge Trapping Layers in Charge Trapping Memories

Li Dejun,Liu Ming,Long Shibing,Wang Qin,Zhang Manhong,Liu Jing,Yang Shiqian,Wang Yong,Yang Xiaonan,Chen Junning,Dai Yuehua
DOI: https://doi.org/10.3969/j.issn.1671-4776.2009.09.002
2009-01-01
Abstract:With the coming of 45 nm and 32 nm technology node,the performance of the devices with the conventional Si3N4 charge trapping layer is limited.The substitution of high-k materials for Si3N4 as charge trapping layer has become the research topic and tendency in the area of micro-electronics at present.Research status and present problem of the charge trapping layer in the charge trapping memory are summarized and analyzed,including Si3N4 dopped O(α-SiOxNy),high-k materials,embedded nanocrystal materials and multistacked structure.And the further research tendency is prospected.
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