High Temperature Nitridation Structures of the Si(111)-(7×7) Surface

HC WANG,RF LIN,X WANG
DOI: https://doi.org/10.1016/s0039-6028(87)80151-6
1987-01-01
Surface Science Letters
Abstract:The initial nitridation structures of the Si(111) surface have been studied by electron energy loss fine structure (EELFS). From the values of the bond lengths between the nitrogen atoms and their nearest silicon atoms obtained by the experimental measurements, it could be deduced that the nitrogen atoms are not at the centers of the three-fold sites of the silicon surface in the “8×8” nitridation structure while in the “quadruplet” structure they do locate at the centers of the three-fold sites but are not co-planar with surface silicon atoms.
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