Effect of phase structures and substrate temperatures on NTC characteristics of Cu-modified Ba–Bi–O-based perovskite-type thermistor thin films
Jing-Jing Qu,Sheng Li,Fei Liu,Xiao Liu,Ze-Xing Chen,Chang-Lai Yuan,Xin-Yu Liu,Yun-Yun Zhao,De-Jian Zhou
DOI: https://doi.org/10.1016/j.mssp.2020.105375
IF: 4.1
2021-01-01
Materials Science in Semiconductor Processing
Abstract:<p>Based on the formula of BaBi<sub>0·92</sub>Cu<sub>0·08</sub>O<sub>3</sub>, Cu-modified Ba–Bi–O-based perovskite-like negative temperature coefficient (NTC) thermistor thin films were successfully prepared by radio frequency (RF) magnetron sputtering method with the various deposition temperatures (25 °C, 100 °C, 200 °C and 250 °C). The effects of the substrate temperatures on the phase structures and electrical properties were respectively characterized and investigated by X-ray diffraction (XRD), resistance-temperature measurement, and complex impedance analysis for the Ba–Bi–O-based thin films. Additionally, the cross-sectional microstructures and grain morphologies of the BaBi<sub>0·92</sub>Cu<sub>0·08</sub>O<sub>3</sub> thin films were analyzed by scanning electron microscope (SEM) and atomic force microscope (AFM). The XRD patterns results showed that the perovskite monoclinic structure with a small amount of BaBiO<sub>2.5</sub> s phase could be obtained for the BaBiO<sub>3</sub> thin film deposited at 200 °C, and also, the main crystalline phase was transferred from BaBiO<sub>2.82</sub> to BaBiO<sub>2.5</sub> when the BaBi<sub>0·92</sub>Cu<sub>0·08</sub>O<sub>3</sub> thin films were deposited at 200 °C and 250 °C, respectively. Temperature dependent complex impedance spectroscopy was carried out to make clear the resistance contribution of grain (<em>R</em><sub>g</sub>), grain boundary (<em>R</em><sub>gb</sub>) and contact (<em>R</em><sub>s</sub>) response for the conduction mechanisms in the Ba–Bi–O-based thin film deposited at a given substrate temperature. Compared with the electrical properties of the BaBiO<sub>3</sub> thin film deposited at 200 °C [such as the room-temperature resistivity (<em>ρ</em><sub>25</sub> ~ 1548 Ω cm) and the thermistor constant (<em>B</em><sub>25/85</sub>–3245 K)], the better NTC characteristics of a lower <em>ρ</em><sub>25</sub> value of about 956 Ω cm and a higher <em>B</em> value of approximately 3480 K were found in the BaBi<sub>0·92</sub>Cu<sub>0·08</sub>O<sub>3</sub> thin film deposited at a same temperature (200 °C). It is believed that the phase structures and electrical properties of the BaBiO<sub>3</sub> perovskite-type NTC thermistor thin films could be adjusted and optimized by a trace amounts of Cu-ions substitutions and depositing at an appropriate substrate temperature, which also showed that such as these novel BaBiO<sub>3</sub>-based thin films are feasible with the extensive of actual applications for the NTC thermistors.</p>
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied