Abstract:X‐Ray diffraction micro‐strain characterization is a technique which enables the quantification of threading dislocations by measuring the radial micro‐strain field surrounding these defects. This work demonstrates how to accurately perform these measurements on a broad range of GaN samples. In particular, for GaN grown on Si substrates with large stress gradient through the layer, the measurements need to be performed on the (20‐25) reflection to avoid being affected by a macro‐strain influence. A comparison of this characterization with cathodoluminescence and x‐ray diffraction lattice misorientations measurements shows differences in the measurement depth, so the results are affected by the various evolutions of dislocations densities through the layers of the different samples. Independently of the measurement depth, the analysis also highlights a dependence of the x‐ray measurements results on the type of sample, in particular the starting substrate. Micro‐strain measurements appear therefore as being well suited for the comparison of threading dislocations densities between similar GaN layers. It can be used to replace lattice misorientations measurements, or be associated with them to obtain an edge vs screw dislocations ratio.This article is protected by copyright. All rights reserved.

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