Sige Optical Waveguide Modulators Based On The Plasma Dispersion Effect

Yong Gao,Guo-zheng Li,Xi-ding Liu,En-ke Liu,Xiang-jiu Zhang,Xue-kun Lu,Xun Wang
DOI: https://doi.org/10.1088/0256-307X/13/3/009
1996-01-01
Chinese Physics Letters
Abstract:Based on plasma dispersion of Si1-xGex, the single mode waveguide modulators consisting of Si1-xGex/Si and Si/Si1-xGex/Si which were grown by molecular beam epitaxy have been fabricated. For Si1-xGex/Si structure, the switch current and insertion loss at wavelength 1.3 mu m are 36 mA and 2.8 dB. respectively The switching response time is 40 ns.
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