SiGe/Si Mach–Zehnder Interferometer Modulator Based on the Plasma Dispersion Effect

BJ Li,ZM Jiang,XJ Zhang,X Wang,JJ Wan,GZ Li,EK Liu
DOI: https://doi.org/10.1063/1.123771
IF: 4
1999-01-01
Applied Physics Letters
Abstract:A SiGe Mach–Zehnder interferometer modulator based on the plasma dispersion effect has been fabricated. A maximum modulation depth of 86% and a switching current of 40 mA with a π-phase-shift voltage of 0.9 V have been achieved at 1.3 μm wavelength. The device has a measured insertion loss of 2.5 dB and a response time of 238 ns.
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