Second Harmonic Distortion Comparison of Mach-Zehnder Silicon Modulators Based on Lateral and Interdigitated PN Junctions

Wei QI,Hai-feng SHAO,Hui YU,Xiao-qing JIANG
DOI: https://doi.org/10.3788/fgxb20163706.0758
2016-01-01
Chinese Journal of Luminescence
Abstract:Electro-optic modulators with high linearity are core devices of microwave photonic link. The modulation mechanism of the silicon optical modulator is based on the carrier dispersion effect which is nonlinear and its nonlinearity is highly related to the structure of PN junction. In this pa-per, the second-order spurious-free dynamic range ( SFDR2 ) is introduced to characterize the second harmonic distortion ( SHD ) of modulators. The SHD of silicon optical Mach-Zehnder modulator ( MZM) based on two most widely used doping patterns, i. e. , the lateral and the interdigitated PN junctions are compared with each other. The experimental results show that the lateral PN junction and interdigitated PN junction based MZMs have SFDR2 of 85. 11 dB·Hz1/2 and 78. 44 dB·Hz1/2 , respectively. The lateral PN junction based MZM has a better linearity.
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