Abstract:With the development of three-dimensional low temperature co-fired ceramic (LTCC) packaging substrate, the internal microscale structures have great effect on the strength, toughness and lifetime of LTCC microsystem, where the study of local or nanoscale mechanical properties and microstructure is critical, especial for the prediction of the local failure behaviors. In this study, the nanoscale mechanical properties and microstructure of 3D LTCC substrate have been investigated. The nanoscale mechanical properties were measured by nanoindentation method on both the top and lateral faces and discussed according to the profile of the residual pit. The Young's modulus and hardness measured by nanoindentation were compared for two faces. The microstructure was studied by using scanning electron microscope and scanning probe microscope. The results show that LTCC can be regarded as a macroscopically homogeneous isotropic material and a particle-reinforced composite at microscopic scales. The properties of the individual particle and matrix were successfully measured and discussed. Moreover, significant effect of the machining process of the embedded channels and cavities on the strength of the substrate and fluid flow in the microchannel are found and discussed according to the microstructures, including the defects found at the corner of the microchannel and impurities found inside the microchannel.

Microstructure and Mechanical Properties of an Alumina–glass Low Temperature Co-Fired Ceramic

The Influence of Alumina to Microstructure and Dielectric Properties for Low Temperature Co-Fired Ceramics

Effect of silica addition on microstructure, sintering behavior, and dielectric properties of borosilicate glass/alumina composites for LTCC application

Microstructure and strength of low temperature co-fired ceramic substrates with channels and cavities

Microwave dielectric characterization and densification mechanism analysis of CaO‐B2O3‐SiO2 glass‐ceramic/Al2O3 composites for LTCC applications

Preparation of low-permittivity K2O–B2O3–SiO2–Al2O3 composites without the addition of glass

Low temperature sintering and characteristics of K2O–B2O3–SiO2–Al2O3 glass/ceramic composites for LTCC applications

Improved flexural strength and dielectric loss in Al2O3-based LTCC with La2O3–CaO–B2O3–SiO2 glass

Sintering, densification and crystallization of Ca–Al–B–Si–O glass/Al 2 O 3 composites for LTCC application

Preparation and properties of Al2O3/Al-2(1-0.2)Mg0.2Ti(1+0.2)O5 matrix ceramic composite

Enhanced thermal and mechanical properties of Li–Al–Si composites with K2O–B2O3–SiO2 glass for LTCC application

Sintering behavior and properties of CABS/MgAl2O4 composite for LTCC applications

The size-effect of Al2O3 on the sinterability, microstructure and properties of glass-alumina composites

Nanoscale mechanical properties and microstructure of 3D LTCC substrate

Preparation and Mechanical Property of Alumina Fibers Reinforced Thin Architectural Ceramic Plate

Effects of Various Fillers on Sintering, Microstructures and Properties of Ca-Ba-Al-B-Si-O Glass/ceramic Composites

Effect Of Talc And Titania On The Microstructure And Mechanical Properties Of Alumina Ceramics

Oxyfluoride Glass-Ceramic Composites for Low Temperature Co-Fired Ceramic Substrate

Sintering Behaviors, Microstructure and Properties of Li2O-Al2O3-SiO2 Glass-ceramics for LTCC Applications

Study on Thermal Shock Resistance of Alumina Composite Ceramics by Indention Quenching Method

Co-continuous Al/Al2O3 composite produced by liquid displacement reaction: Relationship between microstructure and mechanical behavior