Surface layer effective density-of-states (SLEDOS) and its applications in MOS devices modeling

Y. Ma,L. Liu,Z. Li
DOI: https://doi.org/10.1016/S0026-2692(00)00041-0
IF: 1.992
2000-01-01
Microelectronics Journal
Abstract:The concept of surface potential effective density-of-states (SLEDOS) is presented in modeling the quantized inversion layer. Carrier distribution models both in semi-classical and quantum mechanical cases are developed based on SLEDOS. Threshold voltage shift model due to QMEs, a new iteration method to calculate the inversion carrier sheet density and surface potential, as well as a gate capacitance model are built based on the concept of SLEDOS. It is demonstrated that the concept of SLEDOS reveals the physical nature of inversion layer quantization and provides a feasible method to characterize MOS inversion layer.
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