Metallic Bonding Technique and Applications to Optoelectronic Devices

XIE Zhengsheng,WU Huizhen,LAO Yanfeng,LIU Cheng,CAO Meng
2007-01-01
Laser & Optoelectronics Progress
Abstract:The metallic bonding technique is summarized generally, including its developing status, fundamental process and methods, characterization and application to the optoelectronic devices. The common process of the metallic bonding is expatiated, and it can be divided into three steps: evaporation of metals, bonding and substrate etching. The common methods of metallic bonding and its processing condition are also summed up. Especially, The application in the structure fabrication of optoelectronic devices, such as vertical cavity surface emitting laser (VCSEL) is discussed. Metallic bonding can realize up -down assembly and improve the thermal property. But it has little influence on the original optical property of the device.
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