Improvement of Adhesion Strength of Amorphous Carbon Films on Tungsten Ion Implanted 321 Stainless Steel Substrate

Ming Xu,Liuhe Li,Xun Cai,Youming Liu,Qiulong Chen,Paul K. Chu
DOI: https://doi.org/10.1016/j.diamond.2005.11.005
IF: 3.806
2006-01-01
Diamond and Related Materials
Abstract:Amorphous carbon (a-C) films have many potential applications due to their good mechanical properties. However, poor adhesion on substrates such as tool steels limits its applications. In the present work, a-C films were deposited on W-implanted (20 kV, 3×1017 ions-cm−2) steel substrates by means of plasma immersion ion implantation and deposition (PIII&D). Compared to the films deposited on untreated steel substrates, the films deposited on the W-implanted steel substrates exhibit improved hardness, surface morphology, and adhesion strength. The modified layer with graded mechanical properties not only provides a structural continuity from the substrate to the film but also acts as the interlayer to mitigate stress concentration under applied loads.
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