Comparative Study Of Mechanical Properties Of A-C : H Films Produced On Tungsten Pre-Implanted Stainless Steel Substrate By Plasma Immersion Ion Implantation And Deposition

Ming Xu,Xun Cai,Qiulong Chen,Sunny C.H. Kwok,Paul K. Chu

DOI: https://doi.org/10.1016/j.diamond.2006.11.060

IF: 3.806

2007-01-01

Diamond and Related Materials

Abstract:Amorphous carbon (a-C) films have good mechanical properties but poor adhesion on substrates such as tool steels limits its applications. In this work, a-C films were deposited by plasma immersion ion implantation and deposition (PIII&D) on steel substrates using different pretreatment procedures. Our experiments show that a-C:H films with good adhesion strength can be produced on W pre-implanted steel substrates but this is not so on the untreated substrate or on the steel substrate with a W buffer layer. Moreover, altering the pre-implantation parameters gives rise to different distributions and amounts of W in the modified layer and they influence film growth at a later stage. The hardness, elastic properties, and adhesion strength of the deposited a-C films are also strongly affected by the pretreatment parameters. Our results suggest an alternative means to improve the mechanical properties of a-C films on steel substrate in lieu of traditional processes such as the use of an interlayer and multilayer deposition. (c) 2006 Elsevier B.V All rights reserved.