The Study of Millimeter-wave MEMS Phase shifter feed network

Fu Jiahui,Wu Qun
2009-01-01
JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT
Abstract:Feed network of RF MEMS phase shifter is presented in this work.The MAM capacity is plated in MEMS switch,The feed network is composed by MAM capacity,air bridge and bias lines.Using this method,digital control is realized and introduced more stable capacity value.It improves ratios of open and down capacities and performance ofRF MEMS phase shifter.
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