TEM and TEM-EDX Analysis of Cross-Section of Anti-Reflective Thin Film and Glass Substrate

Xingang Yu,Hong Wen Ma,Yanbin Zuo,Hui Feng Zhao,Wu Wen Luo,Wenrue Bi,Li Wang
DOI: https://doi.org/10.4028/0-87849-960-1.1579
2005-01-01
Materials Science Forum
Abstract:Two-layer antireflective films were prepared on Na-Mg-Ca-Si glass substrate by sol-gel process starting from metal alkoxides: Si(OC2H5)(4), Ti(OC4H9)(4). The transmittance of glass was increased obviously (> 95%), the reflective index was reduced to 1.95 through visible light range. TEM observation showed that SiO2 film is compactly joined to TiO2 film and TiO2 film to the substrate. TEM-EDX analysis of the films, film-substrate interface and substrate revealed that with the increase of Ti content, the content of Mg, Ca and Si decreases, however, the content of Na increases. The diffuse of Na+ from the substrate to the film is negative diffusion.
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